For advanced semiconductor manufacturing, boosting process yield starts with controlling microcontamination. Healthy Filters’ full solutions—particle pre-filters, HEPA/ULPA filters, and AMC control—lower cleanroom particles to ISO Class 1 and AMC to sub-ppb levels.
Pre-filter, activated carbon filter, ultrafiltration/reverse osmosis filter
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Airborne Molecular Contamination (AMC) is a big challenge for small-dimension semiconductor production. Acids, bases, organics, and other chemicals cause unwanted reactions on wafers or process equipment optics—creating defects and reducing tool efficiency.
As device sizes shrink and specs get stricter, AMC control becomes vital. Wafers spend up to a month in fabs, going through hundreds of processes. A tiny contamination issue anywhere in the chain crushes overall yield.
Larger wafers add pressure too—they’re more expensive, so nanoparticle and tool-level AMC protection is a must. Plus, costly defect-free masks for EUV and multi-patterning DUV lithography demand top-tier contamination control for facilities and mini-environments.
Protect Wafers & Equipment With Proven Solutions
Healthy Filters’ solutions are lab and field-proven for key semiconductor processes: lithography, etch, diffusion, metallization, thin films, ion implantation, inspection tools, and wafer/reticle storage.
As a professional air filter and industrial filter manufacturer in China.
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